Veeco Metrology Group

Veeco Metrology Group is the leading supplier of 3D measurement tools to the semiconductor industry. Products featured are Dektak Stylus Profilers and Digital Instruments Atomic Force Metrology tools, including Dimension Series Atomic Force Microscopes (AFMs) and Dimension Vx Atomic Force Profilers (AFPs). All tools are available for R&D and in automated configurations for 200mm and 300mm wafers. AFM and AFP applications include pre-and post-CMP monitoring of dishing, erosion, plug recess, and line measurements, as well as trench depth measurements down to 0.1µm geometries and below. Profiler applications include etch rate uniformity, die-level CMP characterization, step heights, solder bumps, and thin film stress measurements.